ATOMICALLY RESOLVED SCANNING-TUNNELING-MICROSCOPY STUDY OF THE ADSORPTION AND DISSOCIATION OF METHYLCHLORIDE ON SI(001)

TitleATOMICALLY RESOLVED SCANNING-TUNNELING-MICROSCOPY STUDY OF THE ADSORPTION AND DISSOCIATION OF METHYLCHLORIDE ON SI(001)
Publication TypeJournal Article
Year of Publication1995
AuthorsBronikowski, MJ, Hamers, RJ
JournalJournal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume13
Pagination777-781
Date PublishedMay-Jun
Type of ArticleProceedings Paper
ISBN Number0734-2101
Accession NumberISI:A1995RD76600054
Keywordsthermal-stability
URL<Go to ISI>://A1995RD76600054